Item | Description |
---|---|
Title | EOL (End of Line) Equipment |
Para No | 1Para or 2Para (Custom Made) |
Test Chart Structure |
1 Side Chart 3 Side Chart 5 Side Chart Multi Type Collimator Lens System (5ea ~ 13ea) |
Function |
Camera Loading & Position Correction Active Alignment (Camera Position) Test (Electrical & Image Quality) ULPA Filter for Clean Room MES Interlock (Custom Made) |
Active Alignment |
Total 6 Axis Motional Control Camera Part : 6 Axis (X, Y, Z, Tx, Ty, Rotation) |
Option |
Working Temperature Test Function Handler (Built-In or Docking Type) |
Expected UPH | 120 ~ 240 |
Dimension | 1030(W)*1120*(D)*2145(H), 400KG |